Product Overview
The SMC XLF-50H0 is a high vacuum angle valve engineered by SMC Corporation, a global leader in pneumatic and vacuum control technology. This valve utilizes a bellows-sealed, pneumatically actuated angle body design to provide reliable isolation and conductance control in high vacuum process lines. Unlike standard hydraulic directional valves, the XLF series is purpose-built for vacuum service, where the angle configuration minimizes flow resistance and enables rapid evacuation and venting. The XLF-50H0 is a direct-acting, normally closed (N.C.) valve that opens via an external pilot air signal, making it ideal for integration into automated vacuum systems requiring precise, repeatable shut-off performance.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Angle Valve (Pneumatically Actuated) |
| Model Designation | XLF-50H0 |
| Operating Pressure | Vacuum service (up to 1×10⁻⁶ Pa range); Pilot air: 0.4–0.7 MPa |
| Mounting & Connection | KF (NW) flange or ISO flange interface; standard SMC vacuum port connections |
| Valve Configuration | Angle body, normally closed (N.C.) |
| Actuation Type | External pneumatic pilot (air-operated) |
| Seal Material | Fluoroelastomer (FKM) / Bellows-sealed stem |
| Body Material | Stainless steel (SUS304/316 equivalent) |
| Port Size | Nominal 50 mm (KF-50 / NW-50 compatible) |
Engineering Features & Advantages
- Precision Vacuum Performance: The angle body design provides high conductance and minimal pressure drop, ensuring rapid pump-down and efficient evacuation in high vacuum systems.
- Bellows-Sealed Stem: Eliminates external leakage and particle generation, maintaining ultra-clean vacuum integrity for sensitive processes.
- Pneumatic Actuation: External pilot air operation enables fast, repeatable cycling and easy integration with automated vacuum control systems.
- Industrial Reliability: Constructed from corrosion-resistant stainless steel and high-grade elastomers for continuous operation under demanding vacuum conditions.
- Direct Fit Replacement: Exact dimensional and functional compatibility with SMC XLF series and standard KF/ISO vacuum interfaces.
Typical Industrial Applications
The SMC XLF-50H0 high vacuum angle valve is widely used in semiconductor manufacturing equipment, vacuum coating and thin-film deposition systems, analytical instrumentation (mass spectrometry, electron microscopy), and industrial
PRODUCT IMAGES
SMC XLF-50H0 High Vacuum Angle Valve
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