Product Overview
The SMC XLFR-100-M9//-2M-X14 is a high vacuum angle valve engineered by SMC Corporation, a global leader in pneumatic and vacuum control technology. This valve operates on a pneumatically actuated, bellows-sealed poppet principle, specifically designed for precise isolation and control of gas flow in high vacuum systems. Its angle body configuration (90° inlet-to-outlet orientation) minimizes conductance loss and eliminates dead volumes, making it ideal for semiconductor manufacturing, thin-film deposition, and analytical instrumentation where contamination-free vacuum integrity is critical. The valve features a double-acting pneumatic actuator with a 2-position, 5-port solenoid pilot (M9 series), providing reliable open/close actuation with position detection capability. The “//-2M-X14” suffix denotes a 2-meter lead wire with an X14 electrical connector configuration, ensuring straightforward integration into existing vacuum control panels and PLC-based process automation architectures.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Angle Valve (Pneumatically Actuated, Bellows-Sealed) |
| Model Designation | XLFR-100-M9//-2M-X14 |
| Nominal Port Size | NW100 (ISO-K / ISO-F compatible flange interface) |
| Valve Configuration | Angle body, 90° flow path, poppet-type sealing |
| Actuation Method | Double-acting pneumatic actuator with M9 solenoid pilot valve |
| Solenoid Voltage | 24 VDC (standard industrial control voltage) |
| Operating Pressure Range | 0.4 to 0.7 MPa (pilot air supply) |
| Achievable Vacuum Level | High vacuum range (10⁻⁶ Pa class, dependent on system pump) |
| Seal Material | Fluoroelastomer (FKM) / metal bellows seal |
| Leak Rate (External) | ≤ 1.3 × 10⁻¹⁰ Pa·m³/s (helium leak tested) |
| Mounting & Connection | ISO-K / ISO-F flange, NW100; panel or base mount |
Engineering Features & Advantages
- Precision Performance: The high vacuum angle valve (pneumatically actuated, bellows-sealed) delivers precise, repeatable performance with low hysteresis and stable control across the full working range.
- Industrial Reliability: Constructed for continuous duty with durable, corrosion-resistant materials and proven engineering for maximum system uptime.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original SMC standards, allowing straightforward retrofit into existing hydraulic systems without rework.
- Rated Capability: Rated for pressure ratings of 0.4 to 0.7 MPa (pilot air supply), supporting stable operation across the full working range.
Typical Industrial Applications
This valve operates on a pneumatically actuated, bellows-sealed poppet principle, specifically designed for precise isolation and control of gas flow in high vacuum systems.
PRODUCT IMAGES
SMC XLFR-100-M9//-2M-X14 High Vacuum Angle Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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