The STEC SEC-4400-MO is a heavy-duty industrial mass flow controller engineered for precise gas flow regulation in semiconductor, analytical, and process gas systems. It utilizes a thermal mass flow sensing principle with a normally-closed proportional control valve, ensuring accurate and repeatable flow control independent of pressure and temperature fluctuations.
STEC SEC-4400-MO Technical Specifications
| Parameter | Specification |
|---|---|
| Flow Range | 0–500 sccm (N2 equivalent) |
| Accuracy | ±1% of setpoint (typical) |
| Repeatability | ±0.5% of full scale |
| Control Valve Type | Normally-closed solenoid proportional valve |
| Response Time | ≤1 second (to within ±2% of setpoint) |
| Operating Pressure | 0–0.5 MPa (gauge) |
| Proof Pressure | 1.0 MPa |
| Leak Integrity | 1×10⁻⁹ Pa·m³/s He |
| Wetted Materials | Stainless steel 316L, PTFE, Viton |
| Electrical Interface | 0–5 VDC analog setpoint and flow output |
| Supply Voltage | ±15 VDC or 24 VDC (model dependent) |
| Process Connections | 1/4″ VCR or Swagelok tube fittings |
| Operating Temperature | 5–50 °C |
| Ingress Protection | IP40 (NEMA 1 equivalent) |
Key Engineering Features
- Thermal mass flow sensing with no moving parts in the flow path for high reliability.
- Proportional solenoid control valve provides fast, stable response to setpoint changes.
- Stainless steel 316L construction with PTFE and Viton seals for corrosion resistance and ultra-high purity gas compatibility.
- Analog 0–5 VDC interface for seamless integration with PLCs, data acquisition systems, and process controllers.
- Compact, modular design with standard VCR or compression fittings for easy installation in gas panels.
- Factory calibration traceable to NIST standards ensures measurement accuracy and repeatability.
Industrial Applications
- Semiconductor manufacturing: gas delivery for etch, deposition, and diffusion processes.
- Analytical instrumentation: carrier and sample gas flow control in GC, LC-MS, and spectroscopy systems.
- Process gas blending and mixing systems requiring precise ratio control.
- R&D laboratories and pilot plants for catalyst testing and flow chemistry.
- Pharmaceutical and biotech processes with critical gas flow requirements.
- Environmental monitoring and calibration gas systems.
For technical inquiries, dimensional drawings, or replacement support for STEC SEC-4400-MO, contact the Pro-Hydraulic engineering team.
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STEC SEC-4400-MO Mass Flow Controller
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Shop the STEC SEC-4400-MO Mass Flow Controller. This precision-engineered industrial component delivers reliable performance and accurate operation for demanding industrial systems.