The STEC SEC-510-X is a heavy-duty industrial mass flow controller engineered for precise gas flow regulation in semiconductor, analytical, and process applications. It utilizes a thermal sensing principle with a capillary sensor and bypass to deliver accurate, repeatable flow measurement and control.
STEC SEC-510-X Technical Specifications
| Parameter | Specification |
|---|---|
| Flow Range | 0–500 sccm (N2 equivalent) |
| Accuracy | ±1% of setpoint (typical) |
| Repeatability | ±0.2% of full scale |
| Response Time | ≤1 second (to within 2% of final value) |
| Operating Pressure | 0–0.7 MPa (0–7 bar) |
| Proof Pressure | 1.0 MPa (10 bar) |
| Gas Compatibility | Non-corrosive gases (N2, Ar, H2, He, etc.) |
| Wetted Materials | Stainless steel 316L, PTFE, Viton |
| Electrical Interface | 0–5 VDC analog, RS-485 (optional) |
| Supply Voltage | ±15 VDC or 24 VDC |
| Process Connection | 1/4″ VCR or Swagelok |
| Operating Temperature | 5–50 °C |
| Leak Integrity | 1×10⁻⁹ atm·cc/sec He |
| Mounting | Panel or manifold mount |
Key Engineering Features
- Thermal mass flow sensing with capillary sensor for stable, drift-free measurement
- Integrated closed-loop control valve for precise flow regulation
- Fast response time and high repeatability for dynamic processes
- Rugged stainless steel construction with high leak integrity
- Analog and optional digital communication interfaces for system integration
Industrial Applications
- Semiconductor manufacturing: gas delivery in CVD, etch, and diffusion processes
- Analytical instrumentation: carrier gas control in GC and LC-MS systems
- Process control: precise gas blending and dosing in chemical and pharmaceutical production
- Research and development: laboratory-scale flow studies and reactor feeding
For technical inquiries, dimensional drawings, or replacement support for STEC SEC-510-X, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
STEC SEC-510-X Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the STEC SEC-510-X Mass Flow Controller. This precision-engineered industrial component delivers reliable performance and accurate operation for demanding industrial systems.