Product Overview
The VAT 02112-BA24-ATG1/0066 is a high-precision vacuum isolation valve engineered by VAT Vakuumventile AG, a global leader in vacuum technology. This valve is designed for reliable shut-off and isolation of vacuum lines in demanding process environments. Featuring a robust pneumatic actuation mechanism, it ensures rapid and repeatable sealing performance, making it an essential component for maintaining process integrity in semiconductor, coating, and industrial vacuum systems. Its compact design and high-conductance body allow for efficient pumping speeds while minimizing particle generation and outgassing.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Process & Pneumatic Valve) |
| Model Designation | 02112-BA24-ATG1/0066 |
| Operating Pressure | Vacuum to 2 bar (absolute) differential |
| Mounting & Connection | ISO-KF / CF flange options (standard VAT interface) |
| Actuation | Pneumatic, double-acting or spring-return |
| Leak Rate | < 1 × 10⁻⁹ mbar·l/s (helium) |
| Body Material | Stainless Steel 304 / 316L |
| Seal Material | Viton / PTFE (application-specific) |
Engineering Features & Advantages
- Precision Performance: Optimized flow path and sealing geometry ensure minimal pressure drop and ultra-low leak rates, critical for maintaining vacuum integrity in sensitive processes.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a robust pneumatic actuator rated for millions of cycles.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, allowing drop-in replacement without system modification.
- Fast Actuation: Rapid open/close times reduce cycle times and protect vacuum pumps from pressure surges.
- Cleanroom Compatible: Low particle generation and high-temperature bake-out capability (up to 150°C) for semiconductor and UHV applications.
Typical Industrial Applications
This vacuum valve is ideal for semiconductor manufacturing equipment (PVD, CVD, etch), vacuum coating systems, analytical instruments (mass spectrometry, electron microscopy), and industrial vacuum furnaces. It is also used in pharmaceutical freeze-drying, leak detection systems, and research laboratories requiring precise vacuum control.
PRODUCT IMAGES
VAT 02112-BA24-ATG1/0066 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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