Product Overview
The VAT 0530X-CA24-AGF1/0646 is a high-precision vacuum isolation valve engineered by VAT Group, a global leader in vacuum valve technology. This component operates as a pneumatically actuated, normally closed (NC) vacuum gate valve designed for reliable isolation and control of gas flow in high-vacuum and process environments. Unlike hydraulic fluid power valves, this unit is specifically engineered for vacuum containment and process gas isolation, utilizing a bellows-sealed or elastomer-sealed gate mechanism to achieve leak-tight closure. It serves as a critical isolation point in semiconductor manufacturing, thin-film deposition, and industrial vacuum coating systems, ensuring process integrity and protecting vacuum pumps from contamination.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Gate Valve) |
| Model Designation | VAT 0530X-CA24-AGF1/0646 |
| Actuation Type | Pneumatic, Normally Closed (NC) |
| Operating Pressure Range | Vacuum to 2 bar (absolute) differential |
| Leak Rate | < 1 × 10⁻⁹ mbar·l/s (He) |
| Mounting & Connection | ISO-KF / CF Flange (Standard Vacuum Interface) |
| Body Material | Stainless Steel (AISI 304/316L) |
| Seal Material | Fluoroelastomer (FKM) / PTFE |
Engineering Features & Advantages
- Precision Vacuum Sealing: The gate mechanism ensures high-conductance isolation with minimal particle generation, critical for maintaining ultra-high vacuum integrity in sensitive processes.
- Pneumatic Actuation Reliability: The CA24 pneumatic actuator provides rapid, consistent cycling with a normally closed fail-safe design, ensuring the valve returns to a safe isolation state upon loss of air pressure.
- Industrial Reliability: Constructed from corrosion-resistant stainless steel with robust sealing technology, built for continuous operation in aggressive process environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT 0530X series mounting interfaces and control signals.
- Low Particle Generation: Designed to minimize contamination in cleanroom and semiconductor applications.
Typical Industrial Applications
This vacuum valve is commonly deployed in semiconductor wafer fabrication equipment (PVD, CVD, etch), thin-film solar panel manufacturing lines, industrial vacuum coating and metallizing systems, and analytical instrumentation requiring high-vacuum isolation. It is also suitable for process gas lines in GF Piping Systems where vacuum containment and precise flow isolation are essential.
PRODUCT IMAGES
VAT 0530X-CA24-AGF1/0646 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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