Product Overview
The VAT 12044-PA44-0003/0177 is a high-precision vacuum isolation valve engineered by VAT Group, the global benchmark in vacuum valve technology for semiconductor, thin-film, and industrial vacuum systems. This valve operates as a pneumatically actuated, bellows-sealed isolation gate, providing reliable on/off control of gas flow between high-vacuum process chambers and pumping lines. Its sealing architecture is designed to maintain ultra-high vacuum integrity while minimizing particle generation and outgassing, making it a critical component in contamination-sensitive process environments. The 12044 series is a proven platform for demanding vacuum isolation duties where leak-tight closure, fast actuation, and long cycle life are mandatory.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatically Actuated Gate Valve) |
| Model Designation | VAT 12044-PA44-0003/0177 |
| Manufacturer | VAT Group |
| Actuation Type | Pneumatic (double-acting, compressed air) |
| Valve Configuration | Gate / Isolation, bellows-sealed, 2-port on/off |
| Operating Pressure Range | High-vacuum to rough-vacuum service (isolation duty) |
| Pneumatic Supply Pressure | Standard industrial compressed air (typically 4–7 bar) |
| Leak Rate (Body / Seat) | Helium leak-tight, UHV-compatible sealing |
| Mounting & Connection | Standard ISO-K / CF flange interface (per model configuration) |
| Position Indication | Integrated open/closed status sensing (per model variant) |
Engineering Features & Advantages
- Precision Sealing Performance: Bellows-sealed gate mechanism delivers repeatable, helium leak-tight isolation, protecting process chamber vacuum integrity and preventing cross-contamination between process and pump lines.
- Pneumatic Actuation: Fast, consistent open/close cycling via compressed air, enabling reliable automated sequencing in process tools and load-lock systems.
- Low Particle Generation: Contact-free gate travel and metal bellows design minimize wear debris, critical for semiconductor and thin-film processes.
- Industrial Reliability: Built for continuous, high-cycle operation under severe vacuum process conditions with extended service intervals.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT standards, allowing straightforward retrofit into existing hydraulic systems without rework.
Typical Industrial Applications
The VAT 12044-PA44-0003/0177 is a high-precision vacuum isolation valve engineered by VAT Group, the global benchmark in vacuum valve technology for semiconductor, thin-film, and industrial vacuum systems.
PRODUCT IMAGES

VAT 12044-PA44-0003/0177 Vacuum Valve
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