Product Overview
The VAT 61238-PEGJ-ALZ1/0410 is a high-precision vacuum isolation valve engineered by VAT Group, a global leader in vacuum valve technology. Operating on a pneumatically actuated gate valve principle, this component is designed to provide reliable isolation and conductance control within high-vacuum and process environments. Unlike hydraulic fluid power valves, this unit is specifically configured for vacuum integrity, utilizing a bellows-sealed or elastomer-sealed gate mechanism to prevent atmospheric leakage into the process chamber. It serves as a critical safety and process control element in semiconductor manufacturing, thin-film deposition, and industrial coating systems, ensuring rapid cycle times and minimal particle generation.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Pneumatic Vacuum Gate Valve / Process Isolation Valve |
| Model Designation | 61238-PEGJ-ALZ1/0410 |
| Operating Pressure | Pneumatic Actuation (Typically 4–7 bar); Vacuum Range: High Vacuum to UHV compatible |
| Mounting & Connection | Standard ISO-K / CF Flange Interface (Manufacturer Specific) |
| Actuation Type | Pneumatic Double-Acting or Spring-Return (PEGJ Series) |
| Seal Material | Elastomer / Bellows Sealed (ALZ1 Configuration) |
Engineering Features & Advantages
- Precision Vacuum Isolation: The gate mechanism ensures bubble-tight sealing, maintaining chamber integrity during critical process steps and preventing cross-contamination between vacuum zones.
- Pneumatic Actuation Reliability: Designed for rapid, repeatable open/close cycles with minimal vibration, reducing particle generation and extending maintenance intervals in automated process lines.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT 61238 series interfaces, ensuring seamless integration into existing vacuum platforms without modification.
- Industrial Reliability: Constructed with corrosion-resistant materials and engineered for continuous operation under severe vacuum and thermal cycling conditions.
Typical Industrial Applications
This vacuum valve is typically deployed in semiconductor wafer fabrication equipment (PVD, CVD, etch), flat panel display manufacturing lines, industrial vacuum coating systems, and high-energy physics research facilities. It is also suitable for load-lock chambers, transfer modules, and any process requiring reliable isolation between high-vacuum and roughing pump stages.
PRODUCT IMAGES
VAT 61238-PEGJ-ALZ1/0410 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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