Product Overview
The VAT 62032-KA28-0002 is a high-precision vacuum isolation valve engineered by VAT Group, the global leader in vacuum valve technology. Operating on a pneumatically actuated, bellows-sealed gate mechanism, this valve provides reliable isolation of vacuum chambers and process lines in demanding industrial environments. Unlike hydraulic directional or pressure control valves, the 62032 series is purpose-built for vacuum containment and process gas isolation, delivering leak-tight sealing and minimal particle generation. Its compact body design and standardized flange interface make it a direct-fit replacement for OEM vacuum systems, ensuring seamless integration into semiconductor, coating, and analytical equipment.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | General Process & Pneumatic Vacuum Valve |
| Model Designation | VAT 62032-KA28-0002 |
| Operating Pressure | Vacuum to 2 bar (absolute), pneumatic actuation 4–7 bar |
| Mounting & Connection | ISO-K / CF flange interface (standard VAT vacuum connection) |
| Actuation Type | Pneumatic, double-acting with spring return |
| Seal Material | Viton® / FKM elastomer (vacuum-compatible) |
| Leak Rate | < 1 × 10⁻⁹ mbar·L/s (helium) |
| Body Material | Stainless Steel 304 / 316L |
Engineering Features & Advantages
- Precision Vacuum Sealing: Bellows-sealed gate mechanism ensures zero external leakage and minimal internal outgassing, maintaining ultra-high vacuum integrity.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a rated cycle life exceeding 1 million actuations.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, including flange patterns and pneumatic port locations.
- Fast Pneumatic Actuation: Double-acting pneumatic cylinder provides rapid open/close response, ideal for automated process cycles.
- Particle-Free Operation: Metal-to-elastomer sealing design minimizes particulate generation, suitable for cleanroom and semiconductor environments.
Typical Industrial Applications
This vacuum valve is widely used in semiconductor manufacturing equipment (PVD, CVD, etch chambers), vacuum coating and thin-film deposition systems, analytical instrumentation (mass spectrometers, electron microscopes), and industrial vacuum furnaces. It is also found in pharmaceutical freeze-drying lines and research laboratory vacuum networks where reliable isolation and low leak rates are critical.
PRODUCT IMAGES
VAT 62032-KA28-0002 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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