Product Overview
The VAT 65150-PHCG-AMK6/0316 is a high-precision vacuum control valve engineered by VAT Group, a global leader in vacuum valve technology. This pneumatically actuated control valve is designed for precise regulation of vacuum pressure and flow within demanding process environments. Unlike hydraulic directional or pressure control valves, this unit operates on a pneumatic actuation principle, utilizing a piston or diaphragm actuator to modulate a sealing plate or poppet against a valve seat. Its primary role is to maintain stable vacuum levels in process chambers, isolate vacuum lines, or provide controlled venting in semiconductor, coating, and industrial vacuum systems. The AMK6 designation indicates a specific actuator and sealing configuration optimized for corrosive or particulate-laden media, ensuring reliable performance in critical process cycles.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Control Valve (Pneumatic Process Valve) |
| Model Designation | 65150-PHCG-AMK6/0316 |
| Operating Pressure | Vacuum to 2 bar (actuator control pressure: 4–7 bar) |
| Mounting & Connection | ISO-KF / CF flange interface (standard VAT vacuum connection) |
| Actuation Type | Pneumatic, single-acting with spring return |
| Seal Material | FKM (Viton) or PTFE for aggressive media |
| Leak Rate | < 1 × 10⁻⁹ mbar·l/s (helium) |
| Body Material | Stainless Steel 304 / 316L |
Engineering Features & Advantages
- Precision Vacuum Regulation: The AMK6 actuator provides fine control of the valve opening, enabling stable pressure setpoints and repeatable process cycles in vacuum chambers.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, including high cycle rates and exposure to corrosive process gases.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, ensuring drop-in replacement without modification to existing vacuum lines.
- Fast Response Time: Pneumatic actuation delivers rapid opening and closing, minimizing cycle times in batch processes.
- Hermetic Sealing: Metal-to-metal or elastomer sealing options provide ultra-low leak rates, maintaining vacuum integrity in critical applications.
Typical Industrial Applications
This vacuum control valve is commonly used in semiconductor manufacturing equipment (PVD, CVD, etch chambers), vacuum coating and sputtering systems, analytical instrumentation (mass spectrometers, electron microscopes), and industrial vacuum furnaces. It is also suitable for pharmaceutical freeze-drying processes and research laboratory vacuum lines where precise pressure control and contamination-free operation are essential.
PRODUCT IMAGES
VAT 65150-PHCG-AMK6/0316 Vacuum Control Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine VAT 65150-PHCG-AMK6/0316 High-Performance Hydraulic Valve. This Germany-made 24V DC hydraulic component features a 2-way normally closed poppet design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.