Product Overview
The VAT 91028-XA31-AAG4/2390 is a high-precision vacuum isolation valve engineered by VAT Group, the global benchmark in vacuum valve technology. Operating on a pneumatically actuated, bellows-sealed gate mechanism, this valve provides reliable, leak-tight isolation of vacuum process lines in semiconductor, thin-film coating, and industrial vacuum systems. Its compact flange-to-flange body integrates directly into high-vacuum and ultra-high-vacuum (UHV) architectures, delivering fast cycle actuation, low particle generation, and long maintenance-free service life. The 91028 series is specifically designed for demanding process environments where repeatable sealing performance and minimal conductance loss are critical to overall system throughput.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Gate Valve) |
| Model Designation | 91028-XA31-AAG4/2390 |
| Manufacturer | VAT Group |
| Actuation Type | Pneumatic (double-acting, compressed air) |
| Sealing Principle | Bellows-sealed gate with elastomer seal |
| Operating Pressure Range | High-vacuum to UHV service (typically 1×10⁻⁹ mbar range) |
| Pneumatic Supply Pressure | 4 – 7 bar (standard industrial compressed air) |
| Mounting & Connection | ISO-K / CF flange interface (per model configuration) |
| Body Material | Stainless steel (corrosion-resistant vacuum-grade) |
| Position Indication | Integrated visual and/or electrical position feedback |
Engineering Features & Advantages
- Precision Vacuum Sealing: Bellows-sealed gate design isolates the actuator from the process chamber, preventing contamination and ensuring repeatable leak-tight closure across millions of cycles.
- Fast Pneumatic Actuation: Double-acting pneumatic drive delivers rapid open/close response, minimizing process cycle time in load-lock and transfer chamber applications.
- Low Particle Generation: Optimized gate travel and sealing geometry reduce wear debris, protecting sensitive substrates and extending maintenance intervals.
- Industrial Reliability: Built for continuous operation under severe vacuum process conditions, including corrosive gas exposure and elevated temperature environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, ensuring drop-in replacement without modification to existing manifolds or piping.
Typical Industrial Applications
Operating on a pneumatically actuated, bellows-sealed gate mechanism, this valve provides reliable, leak-tight isolation of vacuum process lines in semiconductor, thin-film coating, and industrial vacuum systems.
PRODUCT IMAGES
VAT 91028-XA31-AAG4/2390 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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