Product Overview
The VERIFLO SQ2MICRO130E602PFSMM is a high-purity, single-stage pressure regulator engineered for precision control of specialty, corrosive, and ultra-high-purity gases in semiconductor, analytical, and process gas delivery systems. Manufactured by Veriflo (Parker Hannifin), the SQ2 Micro series utilizes a diaphragm-sensed, spring-loaded poppet mechanism that delivers stable downstream pressure regulation with minimal decay and excellent repeatability. Its compact body, low internal volume, and metal-to-metal sealing options make it ideally suited for point-of-use and cylinder applications where gas purity, leak integrity, and contamination control are critical. As a process and pneumatic valve component, it functions strictly as a pressure-reducing regulator, not as a pump or fluid power source.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Purity Pressure Regulator (Process & Pneumatic Valve) |
| Model Designation | SQ2MICRO130E602PFSMM |
| Operating Pressure | Standard Industrial Grade (up to rated inlet pressure per Veriflo SQ2 Micro series) |
| Mounting & Connection | Standard Veriflo high-purity face seal / VCR-compatible interface |
| Regulation Type | Single-stage, diaphragm-sensed pressure reduction |
| Body / Wetted Materials | High-purity stainless steel construction with cleanroom-compatible finishes |
Engineering Features & Advantages
- Precision Performance: Diaphragm-actuated poppet design delivers accurate, repeatable downstream pressure control with minimal droop and low internal dead volume.
- High Purity Integrity: Engineered for ultra-high-purity gas service with low particle generation, minimal outgassing, and optional metal-to-metal sealing for leak-tight performance.
- Industrial Reliability: Built for continuous operation in demanding process environments, resisting corrosion and maintaining stable regulation over extended service intervals.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original Veriflo SQ2 Micro series mounting and port configurations.
Typical Industrial Applications
Semiconductor fabrication and wafer processing gas delivery, analytical instrumentation and laboratory gas systems, specialty and corrosive gas cylinder panels, and high-purity process gas distribution in pharmaceutical and chemical production facilities.
PRODUCT IMAGES
VERIFLO SQ2MICRO130E602PFSMM High Purity Pressure Regulator
âš¡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine VERIFLO SQ2MICRO130E602PFSMM Micro Solenoid Valve. This USA-made 130V AC hydraulic component features a 2-way normally closed design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.