Product Overview
The AERA FC-D985c is a high-precision digital mass flow controller (MFC) engineered for accurate measurement and closed-loop regulation of process gas flows in semiconductor, thin-film, and advanced industrial vacuum systems. Manufactured by AERA Corporation, a recognized brand in precision gas delivery instrumentation, the FC-D985c operates on a thermal mass flow sensing principle combined with an integrated piezoelectric or solenoid-actuated control valve, delivering fast, repeatable flow control independent of upstream pressure and temperature fluctuations. As a core component within automated process control architectures, it interfaces directly with PLC, SCADA, and tool-level host controllers to maintain setpoint accuracy across demanding, continuous-duty manufacturing environments.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (MFC) — Gas Flow Sensor & Control Instrument |
| Model Designation | FC-D985c |
| Manufacturer | AERA Corporation |
| Sensing Principle | Thermal mass flow sensing (capillary or bypass type) |
| Control Valve Type | Integrated normally-closed proportional control valve |
| Operating Pressure | Standard Industrial Grade (typical differential pressure range per manufacturer rating) |
| Mounting & Connection | Standard VCR / compression fitting gas inlet and outlet; panel or manifold mount |
| Signal Interface | Analog setpoint/feedback (0–5 VDC or 4–20 mA) and/or digital communication per model configuration |
Engineering Features & Advantages
- Precision Flow Metering: Thermal sensing element delivers accurate, repeatable gas flow measurement with minimal sensitivity to line pressure and ambient temperature variation.
- Fast Closed-Loop Response: Integrated proportional control valve and feedback electronics provide rapid setpoint tracking for dynamic process recipes.
- Industrial Reliability: Built for continuous operation under severe process conditions, including corrosive and high-purity gas service when configured with compatible wetted materials.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM AERA FC-D985c installations, minimizing downtime and requalification effort.
- System Integration Ready: Standard analog and digital interfaces allow seamless connection to tool controllers, PLCs, and automated gas delivery panels.
Typical Industrial Applications
The AERA FC-D985c mass flow controller is deployed in semiconductor wafer fabrication equipment (CVD, PVD, etch, and diffusion processes), thin-film solar and flat-panel display manufacturing lines, precision vacuum coating and sputtering systems, and analytical or laboratory gas delivery skids requiring accurate, repeatable flow regulation of process and carrier gases.
PRODUCT IMAGES
AERA FC-D985c Mass Flow Controller
âš¡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine AERA FC-D985c Solenoid Directional Control Valve. This Germany-made 24V DC hydraulic component features a 4-way 3-position design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.